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Home/Authors/Haoyu Yang

Haoyu Yang

Topic trends: 32,543 papers · similarity ≥ 0.4 · year ≥ 2024 · Data sourced from Semantic Scholar

34,598 papers | Abstracts: 31,650 (91.5%) | Citations: 34,598 (100.0%) | arXiv: 26,074 (75.4%)

Built: Feb 15, 2026, 5:10 AM AMS

3

papers

9

total citations

papers (3)

ILILT: Implicit Learning of Inverse Lithography Technologies

Intelligent OPC Engineer Assistant for Semiconductor Manufacturing

LithoBench: Benchmarking AI Computational Lithography for Semiconductor Manufacturing