"optical proximity correction" Papers

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Intelligent OPC Engineer Assistant for Semiconductor Manufacturing

Guojin Chen, Haoyu Yang, Bei Yu et al.

AAAI 2025paperarXiv:2408.12775
2
citations

TokMan:Tokenize Manhattan Mask Optimization for Inverse Lithography

Yiwen Wu, Yuyang Chen, Ye Xia et al.

NEURIPS 2025