"semiconductor manufacturing" Papers

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Intelligent OPC Engineer Assistant for Semiconductor Manufacturing

Guojin Chen, Haoyu Yang, Bei Yu et al.

AAAI 2025paperarXiv:2408.12775
2
citations

ILILT: Implicit Learning of Inverse Lithography Technologies

Haoyu Yang, Mark Ren

ICML 2024arXiv:2405.03574
7
citations